A Practical Guide to Optical Metrology for Thin Films by Michael Quinten

By Michael Quinten

A one-stop, concise consultant on identifying and measuring skinny movie thickness via optical methods.

This useful publication covers the legislation of electromagnetic radiation and interplay of sunshine with subject, in addition to the speculation and perform of thickness size, and sleek functions. In so doing, it exhibits the functions and possibilities of optical thickness choice and discusses the strengths and weaknesses of dimension units besides their assessment methods.

Following an creation to the subject, bankruptcy 2 provides the fundamentals of the propagation of sunshine and different electromagnetic radiation in area and topic. the most subject of this ebook, the choice of the thickness of a layer in a layer stack by means of measuring the spectral reflectance or transmittance, is handled within the following 3 chapters. the colour of skinny layers is mentioned in bankruptcy 6. ultimately, in bankruptcy 7, the writer discusses numerous commercial purposes of the layer thickness dimension, together with high-reflection and anti-reflection coatings, photolithographic structuring of semiconductors, silicon on insulator, obvious conductive movies, oxides and polymers, skinny movie photovoltaics, and seriously doped silicon.

Aimed at commercial and educational researchers, engineers, builders and brands interested in all components of optical layer and skinny optical movie size and metrology, approach keep watch over, real-time tracking, and applications.

Chapter 1 creation (pages 1–5):
Chapter 2 Propagation of sunshine and different Electromagnetic Waves (pages 7–57):
Chapter three Spectral Reflectance and Transmittance of a Layer Stack (pages 59–80):
Chapter four The Optical size (pages 81–119):
Chapter five Thin?Film Thickness decision (pages 121–140):
Chapter 6 the colour of skinny movies (pages 141–147):
Chapter 7 functions (pages 149–185):

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Extra resources for A Practical Guide to Optical Metrology for Thin Films

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Therefore, the above integrals must be divided into parts, for example, the real part 2 e1 ðvÞ ¼ 1 þ p V ð1 0 Ve2 ðVÞ 2 dV þ ˆ 2 2 p V Àv V ð2 V1 Ve2 ðVÞ 2 dV þ 2 2 p V Àv 1 ð V2 Ve2 ðVÞ dV: V2 Àv2 ð2:118Þ While the mid integral can be calculated exactly, the two other integrals must be estimated using reasonable assumptions. 1. Beyond that several empiric formulas for the refractive index n(l) have been developed. Especially glass manufacturers use them still today to parametrize the precise measurements at distinct well-defined wavelengths.

9b shows the diffraction by a quadratic slit. The pictures are taken from Ref. [11]. 10) illuminated by a plane wave. The periodicity of the slits is the grating period, g. The reciprocal of the grating period is called groove density, L ¼ 1/g. 9 (a) Diffraction by a rectangular slit of width b and height h. (b) Diffraction by a quadratic slit. Reproduced from Ref. [11], with kind permission of Springer Science þ Business Media. 10 Diffraction by a grating – interference of waves from periodically arranged slits of width b and periodicity g.

27 (a) Dielectric function of Al. (b) Complex refractive index of Al. (c) Reflectance of an aluminum mirror. Optical constants from Ref. [38]. 28 (a) Dielectric function of Au. (b) Complex refractive index of Au. (c) Reflectance of a gold mirror. Optical constants from Ref. [38]. 7 Dielectric Function and Refractive Index as a mirror material in the infrared region because its reflectance amounts always to R > 97% in the infrared, approaching almost 100%. The steep increase at 520 nm is caused by the interband transitions that reach far into the visible spectral region.

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